- 技術(shù)參數(shù)
Specifications Sensor Head ML4010波前傳感器
CCD-Sensor 2/3” Dynamic 12bit Pixel # 1392 x 1040 Wavelength range
with optional converter350 nm - 1100 nm
190 nm - 350 nmPupil size 8.97 x 6.71 mm Max. frame rate 15 fps Spatial Resolution 200 μm Number of Sub Apertures 45 x 34 Dynamic Range (Tilt) ± 1,6° (730 lamda) Wavefront Accuracy < 16 μrad Dynamic Range (Focus) 72 mm (370 lamda) Accuracy 5 x 10-4 /m System Accuracy 10 nm Repeatability 100 nm Wavefront Accuracy 50 nm
- 主要特點(diǎn)
raylux software ML1205
• 快速在線波前計算• Computation of Zernike polynomial terms (tilt, defocus, astigmatism,...)
• Automatic gain and shutter control
• Automatic synchronization with pulsed lasers
• Noise and background control
• Decrease measurement errors by averaging
• Numerical data files of wavefront
• 2D/3D display of wavefront viewable
from any angle or elevation with zoom
• Progression view (time dependent view
of all important parameters)
• M2 and beam divergence analysis
• Additional beam analysis in compliance to ISO
• Far field analysis
• Near field analysis
• Store and recall screens
in single or video fashion
• Fully flexible screen format including save
configuration
- 儀器介紹