日本樫山KASHIYAMA SDE603TX干式真空泵維修
日本KASHIYAMA樫山工業(yè) |
SDE603TX |
產(chǎn)品詳情:
KASHIYAMA SDE-TX Series:
Harsh Process Application Example:
LP-CVD
ALD
Metal-Etch
SA-CVD
Metal-CVD
PE-CVD
Spec. / Products | SDE603TX |
Max. pumping speed | 10,000 |
Ultimate pressure | 0.5 |
Supply voltage | 380~480V?3Phase AC200~220V, |
Dimensions [mm] | W:400 |
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