APC 蝶閥-DeviceNET通訊界面設(shè)置
1. 閥
2. 處理室
3. 進氣口
4. 壓力傳感器
5. 傳感器線
6. 控制器和執(zhí)行器
7. 連接遙控控制器
8. 連接電源線
9. 真空泵
APC 蝶閥剖面-DeviceNet
主要應(yīng)用
真空壓力控制和隔離閥門
應(yīng)用產(chǎn)業(yè)
>> SEMI - 半導(dǎo)體
>> FPD - 光電面板
>> CVD - 化學(xué)氣相沉積
>> Solar - 太陽能
DeviceNet通訊界面
規(guī)格
>> 非常快速準確的壓力控制
>> 閥門位置控制
>> 備用電源：有，用于停電時關(guān)閉閥門。
>> 傳感器電源：24V DC 和±15V DC 均有
>> 2 個線性傳感器或仿真線性物理量的輸入
>> 仿真量和數(shù)字控制
>> 環(huán)境溫度：≤ 70°C max.（控制器部分-24HR）
>> 遠程控制（供客戶選擇）
>> 閥門可由主機（本地控制）通過RS232控制； 用于初始調(diào)整。
>> 狀態(tài)和位置以綠色4位亮數(shù)字顯示。
Model | Connection | Connection Type |
Power | Power input | DB-9 male |
Sensor | Sensor input/ | DB-15 female |
Interface | DeviceNET | M-12 male |
Digital I/O | DI/DO | M-8 male |
Node Address | Address/ Baud rate | 8pin DIP switch |
Service | APC service | Mini USB female |
Monitor | Show status | Green LED display |
DeviceNet通訊界面的APC 軟件功能
使用APC軟件計算機控制提供便利操作功能
- 設(shè)定控制調(diào)整參數(shù)：GAIN
- 壓力和位置控制模式
- 附表測試模式=> 1 cycle schedule
- 設(shè)置閥打開/關(guān)閉速度
- 記錄APC HW/SW 版本, 序列號和型號
- 記錄閥門循環(huán)和運行時間
- 設(shè)置公差范圍的壓力
- 循環(huán)壽命和壓力控制記錄
- 控制器參數(shù)上傳和下載
- 斷電保護功能
- 壓力學(xué)習(xí)功能
APC蝶閥-DeviceNet通訊界面規(guī)格
Valve unit | ||
Material | Body | 304S.S. (*1) |
Plate | 304S.S. (*1) | |
Shaft | 304S.S. | |
Gate seal | Viton | |
Shaft seal | Viton | |
Flange | KF、ISO、CF | |
Mounting position | Any | |
Cycles until first service | Pressure control | 2,000,000(*2) |
Closing / Opening | 250,000 | |
Helium leak rate at 1 atm differential | < 1 x 10-9 mbar．l/sec | |
Pressure range | 1 x 10-8 mbar to 1.2 bar | |
Operating temperature | Body | 10°C to 110°C |
| Actuator | Step Motor | |
Standard accessories | M12 Single-Ended Cordset, 5 Poles, Female (Straight) to Pigtail by CAN Bus, | |
(*1) Body and Plate material can choose aluminum alloy.
(*2) The Cycle life of valve is apply to room temperature 25°C and clean environment, and the opening action apply to be less than 10 mbar pressure difference. (If the opening action exceeds the pressure difference of 10 mbar, it is not covered by this guarantee.)
(*3) If there is particle issue in the working condition of the valve , please clean the valve plate and body regularly and apply some vacuum grease on these parts.
Control and actuating unit | |||
Input voltage | +24 VDC (±10%) | connector: POWER | |
Power consumption | 100W max. (Controller + Motor + Sensor + Power Failure) | connector: POWER | |
Sensor power supply output | +24 VDC /+-15VDC, 500 mA | connector: SENSOR | |
Analog input | |||
Q’ty of sensors | Independent 2 channel | connector: SENSOR | |
Input voltage | 0-10V DC linear Physical quantity | connector: SENSOR | |
Resolution | 12bit | 2.3 mV | connector: SENSOR |
24bit | 0.5 mV | connector: SENSOR | |
Input resistance | Ri = 21 kΩ | connector: SENSOR | |
Digital Input/ Output | |||
Input | Independent 2 channel | connector: INTERFACE | |
Output | Independent 2 channel | connector: INTERFACE | |
Ambient temperature | ≤ 70°C -24HR | ||
Control accuracy | 0.1% of maximum sensor range | ||
Backup power | Yes | ||
KF25,KF40,KF50,CF35 | |||
Closing time | <0.85sec | ||
Opening time | <0.85sec | ||
Valve max. torque | 50kg-cm | ||
Position resolution | 8000 (steps 0-90 rotation) | ||
ISO63, ISO80, ISO100, CF63, CF100 | |||
Closing time | <0.85sec | ||
Opening time | <0.85sec | ||
Valve max. torque | 50kg-cm | ||
Position resolution | 8000 (steps 0-90 rotation) | ||
ISO160, CF150 | |||
Closing time | <3.5sec | ||
Opening time | <3.5sec | ||
Valve max. torque | 90kg-cm | ||
Position resolution | 2400 (steps 0-90 rotation) | ||
Htc APC蝶閥是采用步進馬達驅(qū)動的真空閥，密封板搭配O-ring的設(shè)計，可隔絕真空側(cè)與大氣側(cè)，具有快速開閉、安裝快速、尺寸小，壽命長等優(yōu)點。
Htc APC蝶閥的密封設(shè)計，可應(yīng)用在需隔絶具污染及腐蝕氣體(依照SS304及Viton的Chemical resistance能力)制程中。
